Graphite components for PVD and CVD coating
- Graphite and components made of graphite are utilized at creating thin layers of TiC and TiN by means of PVD and CVD processes.
- Due to high thermal, chemical and mechanical resistance of graphite, the following items are utilized at the abovementioned processes:
- graphite bearing rings
- perforated carriers
- blenders
- holders
- supply pipes